Gas Abatement Tool Heating System

• Complete System that includes everything you need to reduce condensation and build-up on gas abatement tools: Heaters, controls, and accessories.
• Increase tool uptime
• Reduce maintenance cost and decrease frequency of cleans
• Only gas abatement tool heating system that heats every pipe component: valves, bellows, elbows, clamps, etc.
• High Temperature uniformity
• Easily monitor performance with easy-to-use operator interface
• Suitable for up to Class 10 cleanroom indoor environments

Applications:

• Thermal Processing Unit (TPU)
• Gas Reactor Column (GRC)

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Ordering Information:

Gas Abatement tool heating systems are designed per application. Please contact O.E.M. Heaters to get started!